INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS

被引：126

作者：

GRILL, A

MEYERSON, BS

PATEL, VV

REIMER, JA

PETRICH, MA

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[2] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.337883

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2874 / 2877

页数：4

共 18 条

[1] A REVIEW OF RECENT WORK ON HARD I-C FILMS [J].

ANDERSSON, LP .

THIN SOLID FILMS, 1981, 86 (2-3) :193-200

[2]

Andrew E. R., 1971, PROGRESS NMR SPECTRO, V8, P1

[3]

ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[4] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].

BUBENZER, A ;

DISCHLER, B ;

BRANDT, G ;

KOIDL, P .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595

[5]

HAS Z, 1983, 1983 P INT ION ENG C, P1143

[6]

JARMAN RH, 1985, AM CHEM SOC CHEM COM, V107, P1153

[7] CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE [J].

KAPLAN, S ;

JANSEN, F ;

MACHONKIN, M .

APPLIED PHYSICS LETTERS, 1985, 47 (07) :750-753

[8] EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE [J].

MATSUMOTO, O ;

TOSHIMA, H ;

KANZAKI, Y .

THIN SOLID FILMS, 1985, 128 (3-4) :341-351

[9] XPS, AES AND FRICTION STUDIES OF SINGLE-CRYSTAL SILICON-CARBIDE [J].

MIYOSHI, K ;

BUCKLEY, DH .

APPLICATIONS OF SURFACE SCIENCE, 1982, 10 (03) :357-376

[10] THE DEVELOPMENT OF DIAMOND-LIKE (I-CARBON) THIN-FILMS AS ANTI-REFLECTING COATINGS FOR SILICON SOLAR-CELLS [J].

MORAVEC, TJ ;

LEE, JC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :338-340

← 1 2 →