Single-chip condenser miniature microphone with a high sensitive circular corrugated diaphragm

被引：10

作者：

Chen, J ^{[1
]}

Liu, LT ^{[1
]}

Li, ZJ ^{[1
]}

Tan, ZM ^{[1
]}

Xu, Y ^{[1
]}

Ma, J ^{[1
]}

机构：

[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984258

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel single-chip condenser miniature microphone with a circular corrugated diaphragm for residual stress releasing has been proposed, fabricated and tested. The condenser microphone consists of a rigid single-crystal backplate and a flexible circular corrugated diaphragm using induced couple plasma(ICP) etching. An electrostatic-structural coupling finite element analysis(FEA) was performed for design optimization. A sensitivity of 40mv/Pa up to 15KHz has been achieved under a low bias voltage of 14V, which is among the best in the presented reports.

引用

页码：284 / 287

页数：4