Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe

被引：47

作者：

Bémont, E ^{[1
]}

Bostel, A

Bouet, M

Da Costa, G

Chambreland, S

Deconihout, B

Hono, K

机构：

[1] Univ Rouen, CNRS, UMR 6634, Grp Chem Phys Mat, F-76821 Mont St Aignan, France

[2] INSA, F-76821 Mont St Aignan, France

来源：

ULTRAMICROSCOPY | 2003年 / 95卷 / 1-4期

关键词：

3D atom probe; detector; mass resolution; reflectron lens; second-order effects;

D O I：

10.1016/S0304-3991(02)00321-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：231 / 238

页数：8

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