Fabrication and characterization of nanopore-based electrodes with radii down to 2 nm

被引：112

作者：

Krapf, D ^{[1
]}

Wu, MY ^{[1
]}

Smeets, RMM ^{[1
]}

Zandbergen, HW ^{[1
]}

Dekker, C ^{[1
]}

Lemay, SG ^{[1
]}

机构：

[1] Delft Univ Technol, Kavli Inst Nanosci, NL-2628 CJ Delft, Netherlands

来源：

NANO LETTERS | 2006年 / 6卷 / 01期

关键词：

D O I：

10.1021/nl052163x

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report on the fabrication and characterization of gold nanoelectrodes with carefully controlled nanometer dimensions in a matrix of insulating silicon nitride. A focused electron beam was employed to drill nanopores in a thin silicon nitride membrane. The size and shape of the nanopores were studied with high-resolution transmission electron microscopy and electron-energy-loss two-dimensional maps. The pores were subsequently filled with gold, yielding conically shaped nanoelectrodes. The nanoelectrodes were examined by atomic and electrostatic force microscopy. Their applicability in electrochemistry was demonstrated by steady-state cyclic voltammetry. Pores with a radii down to 0.4 nm and electrodes with radii down to 2 nm are demonstrated.

引用

页码：105 / 109

页数：5

共 33 条

[31] CAPACITOR THEORY [J].