Tribological challenges in micromechanical systems

被引：239

作者：

Maboudian, R ^{[1
]}

Ashurst, WR ^{[1
]}

Carraro, C ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

TRIBOLOGY LETTERS | 2002年 / 12卷 / 02期

关键词：

MEMS; molecular films; stiction; self-assembled monolayers;

D O I：

10.1023/A:1014044207344

中图分类号：

TQ [化学工业];

学科分类号：

0817 [化学工程与技术];

摘要：

Despite much progress in surface micromachining technology, adhesion, friction and wear remain key issues, severely limiting the realization and reliability of many microelectromechanical systems (MEMS) devices. In this article, we focus on the use of molecularly thin organic films as release and anti-stiction coatings for MEMS. The various classes of organic films explored for MEMS are reviewed here, followed by a discussion of the current limitations and areas for improvements for this coating technology.

引用

页码：95 / 100

页数：6

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