Modelling discharges in electronegative gases

被引:52
作者
Franklin, RN [1 ]
Snell, J [1 ]
机构
[1] Open Univ, Oxford Res Unit, Oxford OX1 5HR, England
关键词
D O I
10.1088/0022-3727/32/17/309
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper builds on earlier work to give a consistent treatment of the positive column of discharges in electronegative gases covering the transition from collisionless to collisional. In particular it seeks to elucidate the conditions, under which there is an ion-ion plasma core surrounded by an, electron-ion plasma, and when there is not. The parameters which describe the processes of ionization, attachment, detachment and recombination are related to the central negative ion density relative to the electron density and, where appropriate, the size of the core. The use, by earlier workers, of the Boltzmann approximation to describe the negative ion distribution and to obtain ambipolar diffusion coefficients at higher pressures is shown not to be justified. This leads to the clarification of an inconsistency in the literature. Where possible, the work is related to other recent treatments of the same problem in order to begin to build a comprehensive picture of such discharges. The need to have results which combine both detachment and recombination as the negative ion loss processes is identified as outstanding. This, when rectified, should lead to a fully comprehensive treatment.
引用
收藏
页码:2190 / 2203
页数:14
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