On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

被引：16

作者：

Boisset, GC

Robertson, B

Hsiao, WS

Taghizadeh, MR

Simmons, J

Song, K

Matin, M

Thompson, DA

Plant, DV

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH,MIDLOTHIAN,SCOTLAND

[2] MCMASTER UNIV,HAMILTON,ON,CANADA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 07期

关键词：

D O I：

10.1109/68.502270

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to pro,ide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

引用

页码：918 / 920

页数：3

共 10 条

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