SIMPLE TECHNIQUE FOR OUT-OF-FOCUS FEATURE ALIGNMENT

被引：5

作者：

SASIAN, JM ^{[1
]}

BAILLIE, DA ^{[1
]}

机构：

[1] HERIOT WATT UNIV,EDINBURGH EH14 4AS,MIDLOTHIAN,SCOTLAND

来源：

OPTICAL ENGINEERING | 1995年 / 34卷 / 02期

关键词：

OPTICAL ALIGNMENT; FEATURE ALIGNMENT; MICROLENS ARRAYS; FIBER BUNDLES;

D O I：

10.1117/12.194047

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 mu m or better.

引用

页码：564 / 566

页数：3

共 5 条

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BECKMAN, MG ;

WALKER, SL ;

WOJCIK, MJ ;

HINTERLONG, SJ .

OPTICAL ENGINEERING, 1994, 33 (09) :2979-2985

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