A practical measurement system for determination of refractive index and thickness using the low coherence interferometry

被引：5

作者：

Maruyama, H ^{[1
]}

Inoue, S ^{[1
]}

Ohmi, M ^{[1
]}

Ihara, K ^{[1
]}

Nakagawa, S ^{[1
]}

Haruna, M ^{[1
]}

机构：

[1] Kyushu Matsushita Elect Co Ltd, Mat Devices & Components Res Lab, Hakata Ku, Fukuoka 8128531, Japan

来源：

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99) | 1999年 / 3740卷

关键词：

low coherence interferometer; measurement of index and thickness; phase and group indices;

D O I：

10.1117/12.347811

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Very recently, we developed a computer-controlled low-coherence interferometer system with precise translation stages for simultaneous measurement of refractive index and thickness. Both phase and group indices can be determined automatically in a wide thickness range of 20 mu m to a few mm. This paper presents the system configuration and the measurement principle accompanied with typical examples of automatic measurement.

引用

页码：26 / 29

页数：4

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