Elastic and plastic properties of GaN determined by nano-indentation of bulk crystal

被引:152
作者
Nowak, R
Pessa, M
Suganuma, M
Leszczynski, M
Grzegory, I
Porowski, S
Yoshida, F
机构
[1] Hiroshima Univ, Fac Engn, Dept Mech & Phys Solids, Higashihiroshima 7398527, Japan
[2] Tampere Univ Technol, SEMILAB, FIN-33101 Tampere, Finland
[3] Res Inst Aichi Prefectural Govt, Karlya 4480003, Japan
[4] Polish Acad Sci, High Pressure Res Ctr, PL-01142 Warsaw, Poland
[5] Hiroshima Univ, Dept Mech Engn, Higashihiroshima 7398527, Japan
关键词
D O I
10.1063/1.124919
中图分类号
O59 [应用物理学];
学科分类号
摘要
The major obstacle to the production of a blue laser is posed by difficulties with the preparation of defect-free GaN layers. A considerable amount of empirical work is presently being undertaken to achieve this goal. However, there is a lack of basic research on the reduction of residual stress and defects in these epilayers since the mechanical characteristics of GaN have not been measured yet. This is due to difficulties with experimental examination of thin films. This work addresses the mechanical properties of bulk GaN obtained by a high-pressure method. Young's modulus (295 GPa), hardness (20 GPa), yield strength (15 GPa), and the stress-strain curve of GaN have been evaluated using nano-indentation. The cause of the sudden depth excursions during indentation of GaN epilayers has been clarified. (C) 1999 American Institute of Physics. [S0003-6951(99)00140-0].
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页码:2070 / 2072
页数:3
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