Beyond single scattering off flat samples

被引:4
作者
Barradas, NP
Fonseca, A
Franco, N
Alves, E
机构
[1] Inst Tecnol & Nucl, P-2685953 Sacavem, Portugal
[2] Univ Lisbon, Ctr Fis Nucl, P-1649003 Lisbon, Portugal
关键词
RBS; roughness; multilayers; magnetoresistive materials;
D O I
10.1016/j.nimb.2005.07.036
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Most RBS data analysis assumes straight trajectories and one single large angle backscattering event for the analysing beam, and flat sample surface and interfaces. Multiple scattering, plural scattering, and roughness are often ignored. This may lead to erroneous data analysis. In complex systems, understanding and taking into account these effects is essential. We discuss pitfalls that can occur when they are ignored, with emphasis on multilayer systems. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:316 / 320
页数:5
相关论文
共 15 条
[1]   Small angle multiple scattering of fast ions, physics, stochastic theory and numerical calculations [J].
Amsel, G ;
Battistig, G ;
L'Hoir, A .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 201 (02) :325-388
[2]   Simulated annealing analysis of Rutherford backscattering data [J].
Barradas, NP ;
Jeynes, C ;
Webb, RP .
APPLIED PHYSICS LETTERS, 1997, 71 (02) :291-293
[3]   Double scattering in grazing angle Rutherford backscattering spectra [J].
Barradas, NP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 225 (03) :318-330
[4]   Roughness in GaN/InGaN films and multilayers determined with Rutherford backscattering [J].
Barradas, NP ;
Alves, E ;
Pereira, S ;
Shvartsman, VV ;
Kholkin, AL ;
Pereira, E ;
O'Donnell, KP ;
Liu, C ;
Deatcher, CJ ;
Watson, IM ;
Mayer, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 217 (03) :479-497
[5]   Fitting of RBS data including roughness: Application to Co/Re multilayers [J].
Barradas, NP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 190 :247-251
[6]   High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices [J].
Barradas, NP ;
Jeynes, C ;
Mironov, OA ;
Phillips, PJ ;
Parker, EHC .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 139 (1-4) :239-243
[7]   Rutherford backscattering analysis of thin films and superlattices with roughness [J].
Barradas, NP .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (14) :2109-2116
[8]   STUDY OF MULTILAYER SUBSTRATE SURFACE-ROUGHNESS USING RBS WITH IMPROVED DEPTH RESOLUTION [J].
BARRADAS, NP ;
SOARES, JC ;
DASILVA, MF ;
PASZTI, F ;
SZILAGYI, E .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 94 (03) :266-270
[9]   Rutherford backscattering from layered structures beyond the single scattering model [J].
Eckstein, W ;
Mayer, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 153 (1-4) :337-344
[10]  
Jeynes C, 1997, SURF INTERFACE ANAL, V25, P254, DOI 10.1002/(SICI)1096-9918(199704)25:4<254::AID-SIA232>3.0.CO