Detection of CH in an expanding argon/acetylene plasma using cavity ring down absorption spectroscopy

被引：54

作者：

Engeln, R ^{[1
]}

Letourneur, KGY ^{[1
]}

Boogaarts, MGH ^{[1
]}

van de Sanden, MCM ^{[1
]}

Schram, DC ^{[1
]}

机构：

[1] Eindhoven Univ Technol, Dept Appl Phys, Ctr Plasma Phys & Radiat Technol, NL-5600 MB Eindhoven, Netherlands

来源：

CHEMICAL PHYSICS LETTERS | 1999年 / 310卷 / 5-6期

关键词：

D O I：

10.1016/S0009-2614(99)00810-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Cavity ring down (CRD) absorption spectroscopy is used to measure the methylidyne (CH) radical in an Ar/C2H2 plasma. The rotational spectrum of the A(2)Delta(nu' = 0) <-- (XII)-I-2(nu "= 0) transition around 430 nm is recorded to determine the total CH ground state density, both as a function of the current through the are producing the low-pressure Ar plasma and as a function of the injected acetylene flow. Total ground state densities between 5 X 10(15) and 8 X 10(16) m(-3) are detected. The trends show that the methylidyne radical plays a minor role in the growing mechanism of hydrogenated amorphous carbon films and is predominantly formed in the charge exchange/dissociative recombination channel starting from the C2H radical. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：405 / 410

页数：6

共 16 条

[1] TEMPERATURE-DEPENDENCE OF THE REACTIONS OF CH RADICALS WITH UNSATURATED-HYDROCARBONS [J].