Dual-domain point diffraction interferometer

被引:13
作者
Naulleau, PP [1 ]
Goldberg, KA [1 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
关键词
D O I
10.1364/AO.38.003523
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The phase-shifting point diffraction interferometer has recently been developed and implemented at Lawrence Berkeley National Laboratory to meet the significant metrology challenge of characterizing extreme ultraviolet projection lithography systems. Here we present a refined version of this interferometer that overcomes the original design's susceptibility to noise attributed to scattered light. The theory of the new hybrid spatial- and temporal-domain (dual-domain) point diffraction interferometer is described in detail and experimental results are presented. (C) 1999 Optical Society of America. OCIS codes: 050.1970, 050.5080, 120.2650, 120.3180, 260.7200.
引用
收藏
页码:3523 / 3533
页数:11
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