A novel pump for MEMS applications

被引：82

作者：

Sen, M

Wajerski, D

GadelHak, M

机构：

[1] Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, IN

来源：

JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME | 1996年 / 118卷 / 03期

关键词：

D O I：

10.1115/1.2817807

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

[No abstract available]

引用

页码：624 / 627

页数：4

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