Experimental and theoretical investigation on surfactant segregation in imprint lithography

被引：39

作者：

Wu, K. ^{[1
]}

Wang, X. ^{[1
]}

Kim, E. K. ^{[1
]}

Willson, C. G. ^{[1
]}

Ekerdt, J. G. ^{[1
]}

机构：

[1] Univ Texas, Dept Chem Engn, Austin, TX 78712 USA

来源：

LANGMUIR | 2007年 / 23卷 / 03期

关键词：

D O I：

10.1021/la061736y

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The effects of template surface composition on fluorinated surfactant segregation were investigated for imprint lithography with photopolymerizable vinyl ether formulations. Heptadecafluoro-1,1,2,2-tetrahydrodecyl vinyloxy-methyloxy dimethylsilane, containing a vinyl ether group, was employed as the surfactant, and blanket templates were pressed onto the liquid and illuminated with UV radiation from below. The extent of surfactant segregation to the vinyl ether-template interface before polymerization was characterized using contact angle measurements and angle-resolved X-ray photoelectron spectroscopy after removing the template from the cured vinyl ether polymer. Blanket surfaces consisting of bare quartz, high-density polyethylene, and quartz treated with tridecafluoro-1,1,2,2,-tetrahydrooctyltrichlorosilane afforded templates with different surface energy and polarity. The highest degree of surfactant segregation was found with tridecafluoro-1,1,2,2,-tetrahydrooctyltrichlorosilane-treated quartz, whereas little surfactant segregation was found for bare quartz. A thermodynamic model is developed to predict the surface segregation profiles.

引用

页码：1166 / 1170

页数：5

共 25 条

[1] SURFACE SEGREGATION IN BLENDS OF HYDROGENOUS POLYSTYRENE AND PERFLUOROHEXANE END-CAPPPED DEUTERATED POLYSTYRENE, STUDIED BY SSIMS AND XPS [J].