Segregation and strain relaxation in Au/Ni multilayers:: An in situ experiment

被引:31
作者
Labat, S
Gergaud, P
Thomas, O
Gilles, B
Marty, A
机构
[1] Fac St Jerome, MATOP, CNRS, F-13397 Marseille, France
[2] Domaine Univ St Martin Dheres, LTPCM, CNRS, UMR 5614, F-38402 St Martin Dheres, France
[3] CEA, DRFMC, SP2M, Ctr Etud Nucl, F-38054 Grenoble, France
关键词
D O I
10.1063/1.124552
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on in situ real-time measurements of both stress and strain during growth of ultrathin layers, with submonolayer sensitivity. The in-plane lattice parameter is measured by reflection high energy electron diffraction and the stress is determined via the curvature measurements. The system studied is Au/Ni (i.e., Au on Ni and Ni on Au). We have evidenced a large asymmetry in the two different growths: Au (on Ni) shows a progressive elastic strain relaxation, whereas Ni (on Au) exhibits a strong interplay between the stress and the interfacial mixing. (C) 1999 American Institute of Physics. [S0003-6951(99)00733-0].
引用
收藏
页码:914 / 916
页数:3
相关论文
共 20 条
[1]  
[Anonymous], P R SOC A
[2]  
BAKER SP, 1994, MATER RES SOC SYMP P, V343, P555, DOI 10.1557/PROC-343-555
[3]  
BAYLE P, 1994, MATER RES SOC SYMP P, V319, P33
[4]   MELTING AND NONMELTING BEHAVIOR OF THE AU(111) SURFACE [J].
CARNEVALI, P ;
ERCOLESSI, F ;
TOSATTI, E .
PHYSICAL REVIEW B, 1987, 36 (12) :6701-6704
[5]   MEASUREMENT AND INTERPRETATION OF STRESS IN ALUMINUM-BASED METALLIZATION AS A FUNCTION OF THERMAL HISTORY [J].
FLINN, PA ;
GARDNER, DS ;
NIX, WD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (03) :689-699
[6]   Biaxial moduli of coherent Si1-xGex films on Si (001) [J].
Floro, JA ;
Chason, E ;
Lee, SR ;
Petersen, GA .
APPLIED PHYSICS LETTERS, 1997, 71 (12) :1694-1696
[7]   ANHARMONICITY IN NOBLE METALS - HIGHER ORDER ELASTIC CONSTANTS [J].
HIKI, Y ;
GRANATO, AV .
PHYSICAL REVIEW, 1966, 144 (02) :411-+
[8]   Quantitative measurements of Ge surface segregation during SiGe alloy growth [J].
Jernigan, GG ;
Thompson, PE ;
Silvestre, CL .
SURFACE SCIENCE, 1997, 380 (2-3) :417-426
[9]   Elastic relaxation of coherent epitaxial deposits [J].
Kern, R ;
Muller, P .
SURFACE SCIENCE, 1997, 392 (1-3) :103-133
[10]   Microstructure and residual stresses in (111)Au/Ni multilayers [J].
Labat, S ;
Pichaud, B ;
Thomas, O ;
Alfonso, C ;
Charai, A ;
Barrallier, L ;
Gilles, B ;
Marty, A .
THIN SOLID FILMS, 1996, 275 (1-2) :29-34