High performance ZnO nanowire field effect transistor

被引:5
作者
Cha, SN [1 ]
Jang, JE [1 ]
Choi, Y [1 ]
Ho, GW [1 ]
Kang, DJ [1 ]
Hasko, DG [1 ]
Welland, ME [1 ]
Amaratunga, GAJ [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源
PROCEEDINGS OF ESSDERC 2005: 35TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2005年
关键词
D O I
10.1109/ESSDER.2005.1546624
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A zinc oxide (ZnO) nanowire field effect transistor having the highest mobility and lowest subthreshold slope obtained to date (from ZnO) is reported. The device consists of a single nanowire with self-aligned gate electrodes having well defined nano scale spacing, independent of lithographic definition. The fabricated device exhibits a transconductance of 3.06 mu S, a mobility of 450 cm(2)/Vs and a subthreshold swing of 129 mV/decade. The transistor also shows an on/off current ratio of 10(6).
引用
收藏
页码:217 / 220
页数:4
相关论文
共 23 条
  • [1] PHOTO-VOLTAIC PROPERTIES OF ZNO-CDTE HETEROJUNCTIONS PREPARED BY SPRAY PYROLYSIS
    ARANOVICH, JA
    GOLMAYO, D
    FAHRENBRUCH, AL
    BUBE, RH
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) : 4260 - 4268
  • [2] Carbon nanotube based bearing for rotational motions
    Bourlon, B
    Glattli, DC
    Miko, C
    Forró, L
    Bachtold, A
    [J]. NANO LETTERS, 2004, 4 (04) : 709 - 712
  • [3] CHA SN, 2005, IN PRESS APPL PHYS L, V86
  • [4] CHEN J, IEDM 2004, P695
  • [5] Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes
    Cumings, J
    Zettl, A
    [J]. SCIENCE, 2000, 289 (5479) : 602 - 604
  • [6] Surface acoustic wave ultraviolet photodetectors using epitaxial ZnO multilayers grown on r-plane sapphire
    Emanetoglu, NW
    Zhu, J
    Chen, Y
    Zhong, J
    Chen, YM
    Lu, YC
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (17) : 3702 - 3704
  • [7] ZnO nanowire field-effect transistor and oxygen sensing property
    Fan, ZY
    Wang, DW
    Chang, PC
    Tseng, WY
    Lu, JG
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (24) : 5923 - 5925
  • [8] Rotational actuators based on carbon nanotubes
    Fennimore, AM
    Yuzvinsky, TD
    Han, WQ
    Fuhrer, MS
    Cumings, J
    Zettl, A
    [J]. NATURE, 2003, 424 (6947) : 408 - 410
  • [9] Directed growth of ordered arrays of small-diameter ZnO nanowires
    Greyson, EC
    Babayan, Y
    Odom, TW
    [J]. ADVANCED MATERIALS, 2004, 16 (15) : 1348 - +
  • [10] Depletion-mode ZnO nanowire field-effect transistor
    Heo, YW
    Tien, LC
    Kwon, Y
    Norton, DP
    Pearton, SJ
    Kang, BS
    Ren, F
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (12) : 2274 - 2276