High-quality Y-Ba-Cu-O thin films by PLD -: Ready for market applications

被引:44
作者
Lorenz, M
Hochmuth, H
Natusch, D
Kusunoki, M
Svetchnikov, VL
Riede, V
Stanca, I
Kästner, G
Hesse, D
机构
[1] Univ Leipzig, Fac Phys & Geosci, D-04103 Leipzig, Germany
[2] Delft Univ Technol, Natl Ctr HREM, NL-2628 AL Delft, Netherlands
[3] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
关键词
high-temperature superconducting thin films; microwave devices; pulsed laser deposition; YBa2Cu3O7-delta;
D O I
10.1109/77.919747
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Large-area poised laser deposition (PLD) has reached a state in terms of film quality and reproducibility which makes possible now real market applications of PLD-YBa2Cu3O7-delta (YBCO) thin films on both sides of it-plane sapphire substrates as HTSC devices in satellite and mobile communication systems. Bandpass filters optimized from PLD-YBCO thin films presently fulfill the requirements of the main national companies which are active in future communication techniques. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 3-inch diameter Ag-doped YBCO thin films. With the experience of more than 1,000 doable-sided 3-inch diam, films a high degree of homogeneity and reproducibility of j(c) and R-s is reached. The extension up to 8-inch substrate diameter will increase the productivity of the flexible PLD technique considerably.
引用
收藏
页码:3209 / 3212
页数:4
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