LARGE-AREA PULSED-LASER DEPOSITION - TECHNIQUES AND APPLICATIONS

被引:109
作者
GREER, JA
TABAT, MD
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579857
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1175 / 1181
页数:7
相关论文
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