LARGE-AREA, 2-SIDED SUPERCONDUCTING YBA2CU3O7-X FILMS DEPOSITED BY PULSED LASER DEPOSITION

被引：76

作者：

FOLTYN, SR ^{[1
]}

MUENCHAUSEN, RE ^{[1
]}

DYE, RC ^{[1
]}

WU, XD ^{[1
]}

LUO, L ^{[1
]}

COOKE, DW ^{[1
]}

TABER, RC ^{[1
]}

机构：

[1] HEWLETT PACKARD CO,PALO ALTO,CA 94303

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 11期

关键词：

D O I：

10.1063/1.105313

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The in situ excimer-laser deposition process is demonstrated, for the first time, to be an effective technique for producing superconducting films on both sides of substrate wafers of up to 5 cm in diameter. By exploiting the directed nature of the laser produced plume and controlling its off-axis composition, thickness and stoichiometric variations of less than +/- 5% have been obtained over the entire surface. Coatings on 5-cm-diam LaAlO3 substrates have uniform transition temperatures of greater-than-or-equal-to 90 K on both sides, with a critical current density at 77 K and zero field of 2.5 x 10(6) A/cm2. The 10 GHz surface resistance for samples cut from a 5 cm wafer is 40-60-mu-OMEGA at 4 K.

引用

页码：1374 / 1376

页数：3

共 8 条

[1]

ERINGTON KB, 1990, MATER RES SOC SYMP P, V191, P115, DOI 10.1557/PROC-191-115

[2] A VERSATILE SUBSTRATE HEATER FOR USE IN HIGHLY OXIDIZING ATMOSPHERES [J].