Hydrogen ion beam generated by a current-free double layer in a helicon plasma

被引:51
作者
Charles, C [1 ]
机构
[1] Australian Natl Univ, Res Sch Phys Sci & Engn, Plasma Res Lab, Acton, ACT 0200, Australia
[2] CNRS, Dept Sci Ingn, Nantes, France
关键词
D O I
10.1063/1.1643548
中图分类号
O59 [应用物理学];
学科分类号
摘要
A current-free double layer in an expanding hydrogen helicon discharge (13.56 MHz) has been discovered by measuring a beam of hydrogen ions at the low potential side of the double layer. The ion beam is supersonic (similar to2.1c(s)) and is detected using a retarding field energy analyzer positioned downstream of the double layer for pressures below a few mTorr and for radio frequency powers up to 1800 W. (C) 2004 American Institute of Physics.
引用
收藏
页码:332 / 334
页数:3
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