Micro-cavities in silicon-on-insulator photonic crystal slabs: Determining resonant frequencies and quality factors accurately

被引：18

作者：

Qiu, M ^{[1
]}

机构：

[1] Royal Inst Technol KTH, Lab Opt Photon & Quantum Elect, Dept Microelect & Informat Technol, S-16440 Kista, Sweden

来源：

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2005年 / 45卷 / 05期

关键词：

micro-cavity; photonic crystal slabs; silicon-on-insulator;

D O I：

10.1002/mop.20830

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-cavities in two-dimensional silicon-on-insulator (SOI) photonic-crystal slabs are studied. A combination of the finite-difference time-domain (FDTD) technique and the Pad approximation with Baker's algorithm is used to accurately compute the resonant-frequencies and quality,factors simultaneously. The simulations show that, for similar cavity structures, the mode quality factors of cavities in SOI-type photonic-crystal slabs are much smaller than those in membrane photonic-crystal slabs, and deep etching of air holes is still required to obtain relatively higher Omega. (c) 2005 Wiley Periodicals, Inc.

引用

页码：381 / 385

页数：5

共 32 条

[1] High-Q photonic nanocavity in a two-dimensional photonic crystal [J].