Nitric acid pretreatment for the passivation of boron emitters for n-type base silicon solar cells

被引:76
作者
Mihailetchi, Valentin D. [1 ]
Komatsu, Yuji [1 ]
Geerligs, L. J. [1 ]
机构
[1] ECN Solar Energy, NL-1755 ZG Petten, Netherlands
关键词
D O I
10.1063/1.2870202
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have developed a simple method to passivate industrially produced boron-doped emitters for n-type base silicon solar cells using an ultrathin (similar to 1.5 nm) silicon dioxide layer between the silicon emitter and the silicon nitride antireflection coating film. This ultrathin oxide is grown at room temperature by soaking the silicon wafers in a solution of nitric acid prior to the deposition of the silicon nitride antireflection coating film. The n-type solar cells processed in such a way demonstrate a conversion efficiency enhancement of more than 2% absolute over the solar cells passivated without the silicon dioxide layer. (C) American Institute of Physics.
引用
收藏
页数:3
相关论文
共 18 条
[1]   Ultrathin silicon dioxide layers with a low leakage current density formed by chemical oxidation of Si [J].
Asuha ;
Kobayashi, T ;
Maida, O ;
Inoue, M ;
Takahashi, M ;
Todokoro, Y ;
Kobayashi, H .
APPLIED PHYSICS LETTERS, 2002, 81 (18) :3410-3412
[2]   Nitric acid oxidation of silicon at ∼120 °C to form 3.5-nm SiO2/Si structure with good electrical characteristics [J].
Asuha ;
Imai, S ;
Takahashi, M ;
Kobayashi, H .
APPLIED PHYSICS LETTERS, 2004, 85 (17) :3783-3785
[3]   Postoxidation annealing treatments to improve Si/ultrathin SiO2 characteristics formed by nitric acid oxidation [J].
Asuha ;
Liu, YL ;
Maida, O ;
Takahashi, M ;
Kobayashi, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (12) :G824-G828
[4]   Fundamental boron-oxygen-related carrier lifetime limit in mono- and multicrystalline silicon [J].
Bothe, K ;
Sinton, R ;
Schmidt, J .
PROGRESS IN PHOTOVOLTAICS, 2005, 13 (04) :287-296
[5]  
BUCK T, 2006, P 21 EUR PHOT SOL EN, P1264
[6]   Passivation of boron emitters on n-type silicon by plasma-enhanced chemical vapor deposited silicon nitride [J].
Chen, Florence W. ;
Li, Tsu-Tsung A. ;
Cotter, Jeffrey E. .
APPLIED PHYSICS LETTERS, 2006, 88 (26)
[7]   Minimizing lifetime degradation associated with thermal oxidation of upright randomly textured silicon surfaces [J].
Cousins, PJ ;
Cotter, JE .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2006, 90 (02) :228-240
[8]   Millisecond minority carrier lifetimes in n-type multicrystalline silicon [J].
Cuevas, A ;
Kerr, MJ ;
Samundsett, C ;
Ferrazza, F ;
Coletti, G .
APPLIED PHYSICS LETTERS, 2002, 81 (26) :4952-4954
[9]   Excellent passivation of highly doped p-type Si surfaces by the negative-charge-dielectric Al2O3 [J].
Hoex, B. ;
Schmidt, J. ;
Bock, R. ;
Altermatt, P. P. ;
van de Sanden, M. C. M. ;
Kessels, W. M. M. .
APPLIED PHYSICS LETTERS, 2007, 91 (11)
[10]   Surface recombination velocity of phosphorus-diffused silicon solar cell emitters passivated with plasma enhanced chemical vapor deposited silicon nitride and thermal silicon oxide [J].
Kerr, MJ ;
Schmidt, J ;
Cuevas, A ;
Bultman, JH .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (07) :3821-3826