Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching

被引：104

作者：

Wortmann, Dirk ^{[1
]}

Gottmann, Jens ^{[1
]}

Brandt, Nelli ^{[1
]}

Horn-Solle, Herbert ^{[1
]}

机构：

[1] Rhein Westfal TH Aachen, Lehrstuhl Lasertech, D-52074 Aachen, Germany

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 03期

关键词：

D O I：

10.1364/OE.16.001517

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fabrication of microchannels and self-assembled nanostructures in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. While the dimensions in two directions are on a micro-respectively nanoscale, feature lengths of up to 1 mm are achieved. This comes out to aspect ratios of more than 1000. This fabrication technique is potentially usable for photonic crystal based integrated optical elements or microfluidic devices for applications in life science, biology or chemistry. (c) 2008 Optical Society of America.

引用

页码：1517 / 1522

页数：6

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