Indium Tin Oxide thin film gas sensors for detection of ethanol vapours

被引：115

作者：

Vaishnav, VS ^{[1
]}

Patel, PD

Patel, NG

机构：

[1] Sardar Patel Univ, Dept Elect, Vallabh Vidyanagar 388120, Gujarat, India

[2] Sardar Patel Univ, Dept Phys, Vallabh Vidyanagar 388120, Gujarat, India

[3] Univ N Florida, Dept Chem & Phys, Jacksonville, FL 32224 USA

来源：

THIN SOLID FILMS | 2005年 / 490卷 / 01期

关键词：

semiconductor gas sensor; thin film vapour sensor; ethanol; VOC; ITO;

D O I：

10.1016/j.tsf.2005.04.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium Tin Oxide (ITO: In2O3 + 17% SnO2) thin films grown on alumina substrate at 648 K temperatures using direct evaporation method with two gold pads deposited on the top for electrical contacts were exposed to ethanol vapours (200-2500 ppm). The operating temperature of the sensor was optimized. The sensitivity variation of films having different thickness was studied. The sensitivity of the films deposited on Si substrates was studied. The response of the film with MgO catalytic layer on sensitivity and selectivity was observed. A novel approach of depositing thin stimulating layer of various metals/oxides below the ITO film was tried and tested. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：94 / 100

页数：7

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