MAX phase formation by intercalation upon annealing of TiCx/Al (0.4 ≤ x ≤ 1) bilayer thin films

被引:44
作者
Abdulkadhim, Ahmed [1 ]
Takahashi, Tetsuya [1 ]
Music, Denis [1 ]
Munnik, Frans [2 ]
Schneider, Jochen M. [1 ]
机构
[1] Rhein Westfal TH Aachen, D-52074 Aachen, Germany
[2] Helmholtz Zentrum Dresden Rossendorf, D-01328 Dresden, Germany
关键词
MAX phases; Thin film; Bilayer; Intercalation; Annealing; ISOTHERMAL HEAT-TREATMENT; TI-C SYSTEM; MECHANICAL-PROPERTIES; M(N+1)AX(N) PHASES; TEMPERATURE SYNTHESIS; VAPOR-DEPOSITION; RAY-DIFFRACTION; POWDER MIXTURE; RICH CORNER; AT.-PERCENT;
D O I
10.1016/j.actamat.2011.06.029
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
TiCx/Al bilayer thin films were synthesized using combinatorial magnetron sputtering to study the influence of C content on the reaction products at different annealing temperatures. Based on energy-dispersive X-ray analysis calibrated by elastic recoil detection analysis data, x in TiCx was varied from 0.4 to 1.0. Film constitution was studied by X-ray diffraction before and after annealing at temperatures from 500 to 1000 degrees C. The formation of TiCx and Al in the as-deposited samples over the whole C/Ti range was identified. Upon annealing, TiCx reacts with Alto form Ti-Al-based intermetallics. At temperatures as low as 700 degrees C, the formation of MAX phases (space group P6(3)/mmc) is observed at x <= 0.7. Based on the comparison between the C content induced changes in the lattice spacing of TiCx and Ti2AlC as well as Ti3AlC2, we infer the direct formation of MAX phases by Al intercalation into TiCx for x <= 0.7. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:6168 / 6175
页数:8
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