Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses

被引：72

作者：

Day, D ^{[1
]}

Gu, M ^{[1
]}

机构：

[1] Swinburne Univ Technol, Fac Engn & Ind Sci, Ctr Microphoton, Hawthorn, Vic 3122, Australia

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 16期

关键词：

D O I：

10.1364/OPEX.13.005939

中图分类号：

O43 [光学];

学科分类号：

070207 [光学]; 0803 [光学工程];

摘要：

Microchannels are fabricated in a poly(methyl methacrylate) substrate by high repetition rate, nanojoule femtosecond laser pulses. The mechanism for channel fabrication is based on the localized heating of the substrate due to the high repetition rate of the laser, resulting in smooth walled cylindrical channels. Microchannels with diameters of 8-20 mu m can be fabricated at 800 mu m/s using 80 fs pulses at a repetition rate of 80 MHz and energy of 0.9 nJ/ pulse. (C) 2005 Optical Society of America.

引用

页码：5939 / 5946

页数：8

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