Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses

被引：50

作者：

An, R ^{[1
]}

Li, Y

Dou, YP

Yang, H

Gong, QH

机构：

[1] Peking Univ, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China

[2] Peking Univ, Dept Phys, Beijing 100871, Peoples R China

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 06期

关键词：

D O I：

10.1364/OPEX.13.001855

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Longitudinal and transverse microholes are drilled in soda-lime glass by water-assisted ablation with femtosecond laser pulses. True three-dimensional microchannels consisting of longitudinal and transverse microholes are presented. At low incident pulse energy, only one transverse microhole is observed. At high incident pulse energy, multiple transverse microholes can be simultaneously drilled. Using a focusing lens with numerical aperture of 0.5, two, three and four transverse microholes are fabricated at 3.2, 4.9 and 9.3 mu J/pulse, which is qualitatively explained by the multiple foci process. (C) 2005 Optical Society of America.

引用

页码：1855 / 1859

页数：5

共 14 条

[1] Femtosecond pulse propagation in air:: Variational analysis [J].

Aközbek, N ;

Bowden, CM ;

Talebpour, A ;

Chin, SL .

PHYSICAL REVIEW E, 2000, 61 (04) :4540-4549

[2]

An R, 2004, CHINESE PHYS LETT, V21, P2465, DOI 10.1088/0256-307X/21/12/040

[3] Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser [J].

Cheng, Y ;

Sugioka, K ;

Midorikawa, K ;

Masuda, M ;

Toyoda, K ;

Kawachi, M ;

Shihoyama, K .

OPTICS LETTERS, 2003, 28 (01) :55-57

[4] The pulse duration dependence of femtosecond laser induced refractive index modulation in fused silica [J].

Guo, HC ;

Jiang, HB ;

Fang, Y ;

Peng, C ;

Yang, H ;

Li, Y ;

Gong, QH .

JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2004, 6 (08) :787-790

[5] Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass [J].

Hwang, DJ ;

Choi, TY ;

Grigoropoulos, CP .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (03) :605-612

[6] Three-dimensional microdrilling of glass by multiphoton process and chemical etching [J].

Kondo, Y ;

Qiu, J ;

Mitsuyu, T ;

Hirao, K ;

Yoko, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (10A) :L1146-L1148

[7] Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J].

Li, Y ;

Itoh, K ;

Watanabe, W ;

Yamada, K ;

Kuroda, D ;

Nishii, J ;

Jiang, YY .

OPTICS LETTERS, 2001, 26 (23) :1912-1914

[8] Femtosecond laser-assisted three-dimensional microfabrication in silica [J].

Marcinkevicius, A ;

Juodkazis, S ;

Watanabe, M ;

Miwa, M ;

Matsuo, S ;

Misawa, H ;

Nishii, J .

OPTICS LETTERS, 2001, 26 (05) :277-279

[9] 3-D microstructuring inside photosensitive glass by femtosecond laser excitation [J].

Masuda, M ;

Sugioka, K ;

Cheng, Y ;

Aoki, N ;

Kawachi, M ;

Shihoyama, K ;

Toyoda, K ;

Helvajian, H ;

Midorikawa, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (05) :857-860

[10] Femtosecond laser deep hole drilling of silicate glasses in air [J].

Shah, L ;

Tawney, J ;

Richardson, M ;

Richardson, K .

APPLIED SURFACE SCIENCE, 2001, 183 (3-4) :151-164

← 1 2 →