Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser

被引:273
作者
Cheng, Y
Sugioka, K
Midorikawa, K
Masuda, M
Toyoda, K
Kawachi, M
Shihoyama, K
机构
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] Sci Univ Tokyo, Noda, Chiba 2788510, Japan
[3] Hoya Continuum Corp, Toda, Saitama 3350027, Japan
关键词
D O I
10.1364/OL.28.000055
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Theoretical and experimental investigations have been made of the three-dimensional microchannel fabrication of photostructurable glass by use of a femtosecond (fs) laser. Generally, a microchannel fabricated inside glass by the scanning focal spot of a fs laser perpendicular to the direction of laser propagation assumes an elliptical shape with a cross section of large aspect ratio. We demonstrate that one can greatly reduce the aspect ratio merely by inserting a slit, which is oriented parallel to the laser's scanning direction, before the focusing lens. Computer simulations show that a more symmetrical pattern is obtained in the vicinity of the focal point with the help of such a slit, owing essentially to a diffraction effect. (C) 2003 Optical Society of America.
引用
收藏
页码:55 / 57
页数:3
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