Femtosecond laser deep hole drilling of silicate glasses in air

被引：81

作者：

Shah, L

Tawney, J

Richardson, M ^{[1
]}

Richardson, K

机构：

[1] Univ Cent Florida, Sch Opt, Laser Plasma Lab, Orlando, FL 32816 USA

[2] Univ Cent Florida, CREOL, Orlando, FL 32816 USA

[3] Univ Cent Florida, Sch Opt, Glass Proc & Characterizat Lab, Orlando, FL 32816 USA

来源：

APPLIED SURFACE SCIENCE | 2001年 / 183卷 / 3-4期

关键词：

femtosecond laser ablation; silicate glasses; self-focusing;

D O I：

10.1016/S0169-4332(01)00468-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Femtosecond laser pulses are ideal for many precise and delicate laser processing applications. In this work, we demonstrate that femtosecond laser pulses can be used to produce microscopic holes (< 100)mum diameter) with macroscopic depth (>1 mm) in silicate glasses at atmospheric pressures. These experiments indicate that self-focusing is an important factor affecting hole depth at high laser intensity. (C) 2001 Elsevier Science B.V All rights reserved.

引用

收藏

页码：151 / 164

页数：14

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