Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate

被引：211

作者：

Baudach, S ^{[1
]}

Bonse, J ^{[1
]}

Krüger, J ^{[1
]}

Kautek, W ^{[1
]}

机构：

[1] Fed Inst Mat Res & Testing, Lab Thin Film Technol, D-12205 Berlin, Germany

来源：

APPLIED SURFACE SCIENCE | 2000年 / 154卷

关键词：

femtosecond laser ablation; polymer; polycarbonate; polymethylmethacrylate;

D O I：

10.1016/S0169-4332(99)00474-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.5-2.5 J/cm(2) and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：555 / 560

页数：6

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