Optical waveguiding properties and refractive index analysis of boron nitride (BN) thin films prepared by reactive ion plating

被引:5
作者
Boudiombo, J
Boudrioua, A
Loulergue, JC
Malhouitre, S
Machet, J
机构
[1] Univ Metz & Supelec, CLOES, MOPS, F-57078 Metz, France
[2] Fac Sci, Grp PVD, URA 320, LMCTS, F-87060 Limoges, France
关键词
D O I
10.1016/S0925-3467(97)00162-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of hexagonal boron nitride (h-BN) have been prepared using a reactive ion plating process. Investigations of guiding and optical properties of films have been performed using m-line spectroscopy. Both ordinary and extraordinary refractive indices are, respectively, determined from TE and TM mode excitation. Furthermore, refractive index profile analysis using an improved inverse WKB method reveals a gradient-like behavior indicating an optical inhomogeneity of the deposited films along the thickness. An optical anisotropy study confirms the films uniaxial nature with a birefringence, Delta n, of about 0.11. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:143 / 153
页数:11
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