Ion probe diagnostics of laser ablated plumes for thin carbon films deposition

被引：10

作者：

Dwivedi, RK

Singh, SP

Thareja, RK ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Phys, Kanpur 208016, Uttar Pradesh, India

[2] Indian Inst Technol, Ctr Laser Technol, Kanpur 208016, Uttar Pradesh, India

来源：

INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 1998年 / 12卷 / 25期

关键词：

D O I：

10.1142/S0217979298001526

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The propagation of the carbon plumes in argon atmosphere used for film growth by pulsed laser ablation deposition (PLAD) is studied using ion probe. Spatial and angle resolved analysis of plasma parameters as a function of argon gas pressure is presented. The electron temperature is strongly dependent on the angle with target surface normal as well as the distance from the target surface. The forward directed nature of the PLAD process is strongly influenced by the pressure of the ambient gas. The plasma parameters are used to explain the effect of ambient gas pressure on the characteristics of the deposited film.

引用

页码：2619 / 2633

页数：15

共 25 条

[1] LINE-EMISSION ENHANCEMENT IN LASER-ABLATED CARBON PLASMAS [J].

ABHILASHA ;

THAREJA, RK .

APPLIED PHYSICS B-LASERS AND OPTICS, 1995, 61 (01) :63-67

[2] OPTICAL-EMISSION STUDIES OF MOLECULAR CARBON (C2) [J].

ABHILASHA ;

THAREJA, RK .

PHYSICS LETTERS A, 1993, 184 (01) :99-103

[3]

ABHILASHA PSR, 1993, PHYS REV E, V48, P2929

[4]

ABHILASHA RK, 1994, J APPL PHYS, V75, P8237

[5]

Anderson J.B., 1966, ADV CHEM PHYS, V10, P275

[6] DIAGNOSTICS OF YBA2CU3O7-DELTA LASER PLUME BY TIME-OF-FLIGHT MASS-SPECTROMETRY [J].

BERARDI, V ;

AMORUSO, S ;

SPINELLI, N ;

ARMENANTE, M ;

VELOTTA, R ;

FUSO, F ;

ALLEGRINI, M ;

ARIMONDO, E .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (12) :8077-8087

[7] MASS-SPECTROMETRIC INVESTIGATION OF THE KRF LASER-INDUCED PLASMA PLUME CREATED ABOVE AN YBACUO SUPERCONDUCTING TARGET - CORRELATION WITH THICKNESS DISTRIBUTION OF DEPOSITED THIN-FILMS [J].

CHAMPEAUX, C ;

DAMIANI, D ;

AUBRETON, J ;

CATHERINOT, A .

APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :169-173

[8]

CHANG CT, 1977, PLASMA PHYS CONTR F, V19, P1129, DOI 10.1088/0032-1028/19/12/004

[9]

CHEN FF, 1965, PLASMA DIAGNOSTIC TC

[10]

Chrisey D. B., 1994, PULSED LASER DEPOSIT

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