Preparation of crystalline beta barium borate (beta-BaB2O4) thin films by opposed-targets magnetron sputtering

被引:21
作者
Liao, HB [1 ]
Xiao, RF [1 ]
Yu, P [1 ]
Wong, GKL [1 ]
Zheng, JQ [1 ]
机构
[1] HONG KONG UNIV SCI & TECHNOL, MAT CHARACTERIZAT & PREPARAT CTR, KOWLOON, HONG KONG
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 04期
关键词
D O I
10.1116/1.579995
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Crystalline beta barium borate (beta-BaB2O4) thin films have been successfully prepared in situ on several kinds of substrates by using opposed-targets magnetron sputtering. The crystallinity of these films is highly dependent on the deposition temperature. Crystalline films start to form at 500 degrees C and gradually become c-axis aligned as the temperature is increased. At 700 degrees C the film grown on sapphire substrates shows hundred-micrometer-sized domain structures with a single (006) x-ray diffraction peak normal to the film surface. For a linearly polarized fundamental beam incident along the surface normal, the second harmonic intensity exhibits a sixfold azimuthal pattern with a d(22) second harmonic coefficient of 1.2 pm/V. (C) 1996 American Vacuum Society.
引用
收藏
页码:2651 / 2654
页数:4
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