Micro-opto-mechanical vibration sensor integrated on silicon

被引：22

作者：

Ollier, E ^{[1
]}

Philippe, P ^{[1
]}

Chabrol, C ^{[1
]}

Mottier, P ^{[1
]}

机构：

[1] CEA, Dept Microtechnol, LETI, F-38054 Grenoble 9, France

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1999年 / 17卷 / 01期

关键词：

hydroelectric generators; integrated optics; micromachining; micro-opto-electro-mechanical systems; vibration measurement;

D O I：

10.1109/50.737417

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new micro-optical vibration sensor has been achieved by combining "integrated optics" and "micromachining" on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant.

引用

页码：26 / 29

页数：4

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