OPTICAL-FIBER ACCELEROMETER BASED ON A SILICON MICROMACHINED CANTILEVER

被引：22

作者：

MALKI, A

LECOY, P

MARTY, J

RENOUF, C

FERDINAND, P

机构：

[1] ECOLE SUPER INFORMAT ELECTR & ELECTROTECH,SYST MICROELECTR LAB,NOISY LE GRAND,FRANCE

[2] FRAMATOME FRANCE,OPTROFRA,TOUR FIAT,F-92084 PARIS,FRANCE

[3] CEA SACLAY,ELECTR PHYS LAB,F-91191 GIF SUR YVETTE,FRANCE

[4] CEA SACLAY,OPT MEASUREMENT LAB,F-91191 GIF SUR YVETTE,FRANCE

[5] INST NATL SCI APPL,CAPTEURS INSTRUMENTAT & ANAL LAB,F-76131 MONT ST AIGNAN,FRANCE

来源：

APPLIED OPTICS | 1995年 / 34卷 / 34期

关键词：

OPTICAL FIBER; OPTICAL FIBER ACCELEROMETER; SILICON MICROMACHINING;

D O I：

10.1364/AO.34.008014

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of +/-1.2% in the range of 0.1-22 m s(-2), frequency linearity of +/-1% in the range of 0-100 Hz, and a temperature sensitivity of less than 0.03%/degrees C. The sensor is devoted to a wavelength-division multiplexing network.

引用

页码：8014 / 8018

页数：5

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