OPTICAL-FIBER ACCELEROMETER BASED ON A SILICON MICROMACHINED CANTILEVER

被引:22
作者
MALKI, A
LECOY, P
MARTY, J
RENOUF, C
FERDINAND, P
机构
[1] ECOLE SUPER INFORMAT ELECTR & ELECTROTECH,SYST MICROELECTR LAB,NOISY LE GRAND,FRANCE
[2] FRAMATOME FRANCE,OPTROFRA,TOUR FIAT,F-92084 PARIS,FRANCE
[3] CEA SACLAY,ELECTR PHYS LAB,F-91191 GIF SUR YVETTE,FRANCE
[4] CEA SACLAY,OPT MEASUREMENT LAB,F-91191 GIF SUR YVETTE,FRANCE
[5] INST NATL SCI APPL,CAPTEURS INSTRUMENTAT & ANAL LAB,F-76131 MONT ST AIGNAN,FRANCE
来源
APPLIED OPTICS | 1995年 / 34卷 / 34期
关键词
OPTICAL FIBER; OPTICAL FIBER ACCELEROMETER; SILICON MICROMACHINING;
D O I
10.1364/AO.34.008014
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of +/-1.2% in the range of 0.1-22 m s(-2), frequency linearity of +/-1% in the range of 0-100 Hz, and a temperature sensitivity of less than 0.03%/degrees C. The sensor is devoted to a wavelength-division multiplexing network.
引用
收藏
页码:8014 / 8018
页数:5
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