Effects of substrate surface morphology on microcrystalline silicon solar cells

被引:141
作者
Nasuno, Y [1 ]
Kondo, M [1 ]
Matsuda, A [1 ]
机构
[1] Electrotech Lab, Thin Film Silicon Solar Cells Super Lab, Tsukuba, Ibaraki 3058568, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2001年 / 40卷 / 4A期
关键词
substrates surface morphology; microcrystalline silicon; solar cells; Ga-doped ZnO; grain boundary formation; optical confinement;
D O I
10.1143/JJAP.40.L303
中图分类号
O59 [应用物理学];
学科分类号
摘要
The relationship between muc-Si:H solar cell performance and surface morphology of substrate is studied systematically using textured-ZnO substrate which is formed by wet etching process in order to clarify the optimum morphology of substrate for high efficiency. An average slope, tan theta, of substrate surface textures is obtained by analysis of atomic force microscopy (AFM) images, and solar cell performance is correlated with the value os tan theta. As a result, because of the balance between the optical confinement and the grain boundary formation, a conversion efficiency shows a maximum at a tan theta of 0.08 which is 3 times smaller as compared to that used for a-SM. An efficiency of 9.4% (V-oc = 0.526 V, J(se) = 25.3 mA/cm(2), FF = 0.710) is obtained at a deposition temperature of 140 degreesC using the optimized morphology.
引用
收藏
页码:L303 / L305
页数:3
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