Thermal decomposition of InP surfaces: volatile component loss, morphological changes, and pattern formation

被引：13

作者：

Riesz, F

Dobos, L

Vignali, C

Pelosi, C

机构：

[1] Hungarian Acad Sci, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

[2] Univ Parma, Interfac Measurement Ctr, I-43100 Parma, Italy

[3] CNR, Inst Maspec, I-43010 Parma, Italy

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2001年 / 80卷 / 1-3期

基金：

匈牙利科学研究基金会;

关键词：

InP; thermal decomposition; pattern formation;

D O I：

10.1016/S0921-5107(00)00588-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The thermal decomposition of bulk and heteroepitaxial InP surfaces is studied by in-situ scanning electron microscopy combined with mass spectrometry and atomic force microscopy. Correlation is established between the evaporation of phosphorous and the formation of thermal etch pits. The formation of the pattern that the In droplets constitute is analysed using fractal mathematics. Only negligible roughening is induced by annealing outside the pits. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：54 / 59

页数：6

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