Wafer-scale synthesis of graphene by chemical vapor deposition and its application in hydrogen sensing

被引：233

作者：

Wu, Wei ^{[1
,2
]}

Liu, Zhihong ^{[2
]}

Jauregui, Luis A. ^{[3
,4
]}

Yu, Qingkai ^{[1
,2
]}

Pillai, Rajeev ^{[1
]}

Cao, Helin ^{[3
,5
]}

Bao, Jiming ^{[2
]}

Chen, Yong P. ^{[3
,4
,5
]}

Pei, Shin-Shem ^{[1
,2
]}

机构：

[1] Univ Houston, Ctr Adv Mat, Houston, TX 77204 USA

[2] Univ Houston, Dept Elect & Comp Engn, Houston, TX 77204 USA

[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

[4] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA

[5] Purdue Univ, Dept Phys, W Lafayette, IN 47907 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 150卷 / 01期

基金：

美国国家科学基金会;

关键词：

Graphene; Chemical vapor deposition; Gas sensor; WALLED CARBON NANOTUBES; FEW-LAYER GRAPHENE; LARGE-AREA; SINGLE; NANOPARTICLES; PERFORMANCE; FILMS; GAS;

D O I：

10.1016/j.snb.2010.06.070

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Graphene with a large area was synthesized on Cu foils by chemical vapor deposition under ambient pressure A 4 '' x 4 '' graphene film was transferred onto a 6 '' Si wafer with a thermally grown oxide film Raman mapping indicates monolayer graphene dominates the transferred graphene film Gas sensors were fabricated on a 4 mm x 3 mm size graphene film with a 1 nm palladium film deposited for hydrogen detection Hydrogen in air with concentrations in 00025-1% (25-10,000 ppm) was used to test graphene-based gas sensors The gas sensors based on palladium-decorated graphene films show high sensitivity, fast response and recovery, and can be used with multiple cycles The mechanism of hydrogen detection is also discussed (C) 2010 Elsevier B V All rights reserved

引用

页码：296 / 300

页数：5

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