Local coordination of Ga impurity in hydrogenated amorphous germanium studied by extended x-ray absorption fine-structure spectroscopy

被引:12
作者
Dalba, G [1 ]
Fornasini, P
Grisenti, R
Rocca, F
Comedi, D
Chambouleyron, I
机构
[1] Univ Trent, Dipartimento Fis, I-38050 Povo, Italy
[2] Ist Nazl Fis Mat, I-38050 Povo, Italy
[3] CNR, Ctr Fis Stati Aggregati ITC, I-38050 Povo, Italy
[4] UNICAMP, Inst Fis Gleb Wataghin, BR-13083970 Campinas, SP, Brazil
关键词
D O I
10.1063/1.122999
中图分类号
O59 [应用物理学];
学科分类号
摘要
The local structure of Ga-doped a-Ge:H films has been investigated by extended x-ray absorption fine-structure (EXAFS) fluorescence for impurity concentrations ranging from 1.5 X 10(18) atoms cm(-3) to 4.5 X 10(20) atoms cm(-3). The mean-coordination number of Ga atoms changes from around 4 (1.5 X 10(18)-1.5 X 10(19) cm(-3)) to below 3 (1.5 X 10(20)- 4.5 X 10(20) cm(-3)) with rising concentration. The change from fourfold to threefold coordination occurs in a rather narrow impurity concentration range. The variance of the distance distribution function decreases with increasing Ga content, suggesting that well-ordered sites are present at high-impurity concentration. From EXAFS phase analysis the first Ga-Ge shell distance has been found to be 0.03 Angstrom larger in the amorphous network than in Ga-doped crystalline Ge. (C) 1999 American Institute of Physics. [S0003-6951(99)05102-5].
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页码:281 / 283
页数:3
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