Fabrication of a peristaltic PDMS micropump

被引：90

作者：

Jeong, OC

Park, SW

Yang, SS

Pak, JJ

机构：

[1] Ajou Univ, Div Elect & Comp Engn, Suwon 443749, South Korea

[2] Ritsumeikan Univ, COE Program, Ctr Promot, Kyoto, Japan

[3] Korea Univ, Dept Elect Engn, Seoul, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

peristaltic thermopneumatic micropump; polydimethylsiloxane (PDMS); flow rate;

D O I：

10.1016/j.sna.2005.01.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The nucropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 mu m, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 mu L/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V. (C) 2005 Elsevier B.V. All rights reserved.

引用

页码：453 / 458

页数：6

共 6 条

[1] NORMALLY CLOSED MICROVALVE AND MICROPUMP FABRICATED ON A SILICON-WAFER [J].