Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV)

被引：71

作者：

El Gomati, M. M. ^{[1
]}

Walker, C. G. H. ^{[1
]}

Assad, A. M. D. ^{[1
]}

Zadrazil, M. ^{[1
]}

机构：

[1] Univ York, Dept Elect, York YO10 5DD, N Yorkshire, England

来源：

SCANNING | 2008年 / 30卷 / 01期

基金：

英国工程与自然科学研究理事会;

关键词：

Monte Carlo; electron; backscattering factor; low energy; stopping power;

D O I：

10.1002/sca.20091

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The electron backscattering factor was measured from 24 different elements at low primary beam energy (250-5,000 eV). The results were compared with Monte Carlo simulations from a variety of freely available programs and an in-house developed program. The results suggest that a thin film of oxide can modify the backscattering factor at low primary energy. In addition, a number of problems have been identified with the freely available programs.

引用

页码：2 / 15

页数：14

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