Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV)

被引：71

作者：

El Gomati, M. M. ^{[1
]}

Walker, C. G. H. ^{[1
]}

Assad, A. M. D. ^{[1
]}

Zadrazil, M. ^{[1
]}

机构：

[1] Univ York, Dept Elect, York YO10 5DD, N Yorkshire, England

来源：

SCANNING | 2008年 / 30卷 / 01期

基金：

英国工程与自然科学研究理事会;

关键词：

Monte Carlo; electron; backscattering factor; low energy; stopping power;

D O I：

10.1002/sca.20091

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The electron backscattering factor was measured from 24 different elements at low primary beam energy (250-5,000 eV). The results were compared with Monte Carlo simulations from a variety of freely available programs and an in-house developed program. The results suggest that a thin film of oxide can modify the backscattering factor at low primary energy. In addition, a number of problems have been identified with the freely available programs.

引用

页码：2 / 15

页数：14

共 43 条

[21]

JABLONSKI A, 2002, NIST ELECT ELASTICSC

[22]

Joy D. C., 1996, Scanning Microscopy, V10, P653

[23] Low Voltage Scanning Electron Microscopy - Current Status, Present Problems, and Future Solutions [J].

Joy, David C. .

E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2006, 4 :369-375

[24] AN EMPIRICAL STOPPING POWER RELATIONSHIP FOR LOW-ENERGY ELECTRONS [J].

JOY, DC ;

LUO, S .

SCANNING, 1989, 11 (04) :176-180

[25]

KIRK D, 1992, GRAPHICS GEMS, V3

[26]

Kuhr JC, 1999, PHYS STATUS SOLIDI A, V172, P433, DOI 10.1002/(SICI)1521-396X(199904)172:2<433::AID-PSSA433>3.0.CO

[27]

2-X

[28]

LUO S, 1993, P 51 ANN M MSA, P1188

[29]

NAPCHAN E, 2006, DATABASE ELECT SOLID

[30]

PAETH A, 1995, GRAPHICS GEMS, V5

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