Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells

被引：86

作者：

Zoppel, S.

Huber, H.

Reider, G. A.

机构：

[1] Vienna Univ Technol, Photon Inst, A-1040 Vienna, Austria

[2] Vorarlberg Univ Appl Sci, Res Ctr Microtechnol, A-6850 Dornbirn, Austria

[3] HighQLaser Prod GmbH, A-6845 Hohenems, Austria

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 89卷 / 01期

关键词：

Industrial applications - Molybdenum - Solar cells - Substrates - Ultrashort pulses;

D O I：

10.1007/s00339-007-4158-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on recent results on selective ablation of TCO (SnO2, ZnO) and metallic layers as a possible process for structuring thin film solar cells. The multipulse ablation thresholds determined for substrate and various thin films show a parameter window where the films can be completely removed by a single scan without at the same time damaging the underlying material. By employing ultrashort pulsed lasers, nonthermal ablation at repetition rates up to the megahertz regime enables high quality structuring combined with process speeds meeting industrial demands.

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收藏

页码：161 / 163

页数：3

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