Onset of shadowing-dominated growth in glancing angle deposition

被引:28
作者
Amassiana, Aram
Kaminska, Kate
Suzuki, Motofumi
Martinu, Ludvik
Robbie, Kevin
机构
[1] Ecole Polytech, RQMP, Montreal, PQ H3C 3A7, Canada
[2] Ecole Polytech, Dept Engn Phys, Montreal, PQ H3C 3A7, Canada
[3] Queens Univ, Dept Phys, Kingston, ON K7L 3N6, Canada
[4] Kyoto Univ, Grad Sch Engn, Dept Engn Phys & Mech, Kyoto 6068501, Japan
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1063/1.2794420
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate that shadowing instabilities can dramatically alter the very early stages of growth of amorphous thin films on nominally smooth surfaces. These observations are made by comparing the porosity and morphological evolutions of thin films grown under conditions of normal and glancing incidences of the vapor flux. At conditions of normal incidence, we see evidence of nucleation, followed by coalescence and growth of a continuous film; at glancing incidence, we observe the development of a mounded surface morphology before deposition of the first nanometer, followed by growth of isolated nanopillars. (C) 2007 American Institute of Physics.
引用
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页数:3
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