Preparation of positive LiCoO2 films by electron cyclotron resonance (ECR) plasma sputtering method and its application to all-solid-state thin-film lithium batteries

被引：31

作者：

Hayashi, Masahiko ^{[1
]}

Takahashi, Masaya ^{[1
]}

Sakurai, Yoji ^{[2
]}

机构：

[1] NTT Corp, NTT Energy & Environm Syst Labs, Kanagawa 2430198, Japan

[2] NTT Corp, NTT Microsyst Integrat Labs, Kanagawa 2430198, Japan

来源：

JOURNAL OF POWER SOURCES | 2007年 / 174卷 / 02期

关键词：

LiCoO2; electron cyclotron resonance (ECR) plasma sputtering; all-solid-state thin-film battery; high energy density;

D O I：

10.1016/j.jpowsour.2007.06.081

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin films of LiCoO2 prepared by the electron cyclotron resonance (ECR) sputtering method are investigated under various deposition conditions. Well-crystallized LiCoO2 films were obtained without a post-annealing process in a high microwave and RF power range with a low O-2 to Ar ratio. All-solid-state thin-film lithium batteries using the LiCoO2 films (thickness: 6.2 mu m) provided a discharge capacity of about 250 mu Ah cm(-2) with good cyclability. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：990 / 995

页数：6

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