Superhard conductive carbon nanocrystallite films

被引:104
作者
Hirono, S
Umemura, S
Tomita, M
Kaneko, R
机构
[1] NTT Afty Corp, Mitaka, Tokyo 1810013, Japan
[2] Chiba Inst Technol, Chiba 2750016, Japan
[3] NTT, Lifestyle & Environm Technol Labs, Kanagawa 2430198, Japan
[4] Wakayama Univ, Wakayama 640, Japan
关键词
D O I
10.1063/1.1435402
中图分类号
O59 [应用物理学];
学科分类号
摘要
Carbon films whose hardness is comparable to diamond's, but whose electrical conductivity is 19 orders of magnitude larger, have been discovered. The films were deposited onto silicon substrates by electron cyclotron resonance plasma sputtering. The bonding structure of the film was mainly sp(2). The film consisted of sp(2) nanocrystallites having parallel and curved graphene sheets vertically oriented to the film surface. The sp(2) nanocrystallites were connected with adjacent crystallites by sp(3) bonding, which gives the film both its high hardness and conductivity. These sp(2) nanocrystallite films will have many applications. (C) 2002 American Institute of Physics.
引用
收藏
页码:425 / 427
页数:3
相关论文
共 9 条
[1]   Separation of the sp(3) and sp(2) components in the C1s photoemission spectra of amorphous carbon films [J].
Diaz, J ;
Paolicelli, G ;
Ferrer, S ;
Comin, F .
PHYSICAL REVIEW B, 1996, 54 (11) :8064-8069
[2]   High wear durability of ECR-sputtered carbon films [J].
Hirono, S ;
Umemura, S ;
Andoh, Y ;
Hayashi, T ;
Kaneko, R .
IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :1729-1731
[3]   Tetrahedral bonding in amorphous carbon [J].
McKenzie, DR .
REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (12) :1611-1664
[4]  
ONO T, 1984, JPN J APPL PHYS, V23, P534
[5]  
ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911
[6]  
SIMMONS JW, 1965, RAD DAMAGE GRAPHITE, P9
[7]   STUDIES OF THE CO-H,H2-NI(100) SYSTEM USING PHOTOELECTRON-SPECTROSCOPY [J].
TILLBORG, H ;
NILSSON, A ;
MARTENSSON, N .
SURFACE SCIENCE, 1992, 273 (1-2) :47-60
[8]   CHARACTERIZATION OF DIAMOND-LIKE CARBON-FILMS AND THEIR APPLICATION AS OVERCOATS ON THIN-FILM MEDIA FOR MAGNETIC RECORDING [J].
TSAI, HC ;
BOGY, DB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (06) :3287-3312
[9]   Nanoindentation and nanowear tests on amorphous carbon films [J].
Umemura, S ;
Andoh, Y ;
Hirono, S ;
Miyamoto, T ;
Kaneko, R .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1996, 74 (05) :1143-1157