Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

被引：46

作者：

Cho, WS ^{[1
]}

Moon, SI

Lee, YD

Lee, YH

Park, JH

Ju, BK

机构：

[1] Korea Inst Sci & Technol, Opto Elect Mat Res Ctr, Seoul 136791, South Korea

[2] Korea Inst Sci & Technol, Dept Elect Engn, Seoul 136791, South Korea

[3] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea

[4] Korea Univ, Dept Phys, Seoul 136701, South Korea

来源：

IEEE ELECTRON DEVICE LETTERS | 2005年 / 26卷 / 07期

关键词：

gas sensor; multiwall carbon nanotube (MWCNT); nitrogen dioxide (NO2); recovery;

D O I：

10.1109/LED.2005.851095

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We address a multiwall carbon nanotube (MWCNT) gas sensor that has an enhanced reproducibility. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and an MWCNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature changes to modify the rates for desorption of gases on the sensing surface during sensor operation. Gas sensor responses of MWCNT-film to NO2 at room temperature are reported. We show that the sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of 130 degrees C.

引用

页码：498 / 500

页数：3

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