Systematic prediction of kinetically limited crystal growth morphologies

被引:105
作者
Du, DX [1 ]
Srolovitz, DJ
Coltrin, ME
Mitchell, CC
机构
[1] Princeton Univ, Dept Mech & Aerosp Engn, Princeton, NJ 08540 USA
[2] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1103/PhysRevLett.95.155503
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We develop a new, combined experimental and theoretical approach to make reliable predictions for the limiting case of surface reaction kinetics controlled growth. We solve the inverse problem of determining the growth velocity from observations of the evolution of the morphology of GaN islands grown by metalorganic chemical vapor deposition and make use of crystal symmetry and established theorems. We are able to predict the growth for both convex and concave surfaces, with faceted and curved features. We also give a general guideline for deducing growth velocities from experimental observations.
引用
收藏
页数:4
相关论文
共 17 条
[1]   MICROSCOPIC THEORY FOR ANTIPHASE BOUNDARY MOTION AND ITS APPLICATION TO ANTIPHASE DOMAIN COARSENING [J].
ALLEN, SM ;
CAHN, JW .
ACTA METALLURGICA, 1979, 27 (06) :1085-1095
[2]   CURRENT STATUS OF SELECTIVE AREA EPITAXY BY OMCVD [J].
BHAT, R .
JOURNAL OF CRYSTAL GROWTH, 1992, 120 (1-4) :362-368
[3]   FREE ENERGY OF A NONUNIFORM SYSTEM .1. INTERFACIAL FREE ENERGY [J].
CAHN, JW ;
HILLIARD, JE .
JOURNAL OF CHEMICAL PHYSICS, 1958, 28 (02) :258-267
[4]   Scaling relationships for analyzing kinetics in GaN epitaxial lateral overgrowth [J].
Coltrin, ME ;
Mitchell, CC .
JOURNAL OF CRYSTAL GROWTH, 2004, 261 (01) :30-37
[5]  
Frank F. C., 1958, GROWTH PERFECTION CR
[6]   SOME THEOREMS ON THE FREE ENERGIES OF CRYSTAL SURFACES [J].
HERRING, C .
PHYSICAL REVIEW, 1951, 82 (01) :87-93
[7]   Facet formation and overgrowth of sub-μm W-patterns on GaAs(001) surfaces [J].
Jarlskog, L ;
Wernersson, LE ;
Borgström, M ;
Seifert, W ;
Samuelson, L .
JOURNAL OF CRYSTAL GROWTH, 2001, 222 (03) :534-537
[8]  
Klein C., 2002, The 22nd Edition of the Manual of Mineral Science
[9]   Mass transport in the epitaxial lateral overgrowth of gallium nitride [J].
Mitchell, CC ;
Coltrin, ME ;
Han, J .
JOURNAL OF CRYSTAL GROWTH, 2001, 222 (1-2) :144-153
[10]  
OSHER S, 1997, ASIAN J MATH, V1, P560