Electron cross section set for CHF3

We describe the development of a consistent set of low-energy electron collision cross sections for trifluoromethane, CHF3. First-principles calculations are used to obtain key elastic and inelastic cross sections. These are combined with literature values of the ionization cross section and with vibrational excitation cross sections obtained from the Born approximation to form a preliminary set, which is then adjusted to achieve consistency with measured swarm parameters. (C) 2001 American Institute of Physics.